Monolithically integrated WDM demultiplex module and method of m

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350 9615, 350 9619, G02B 610

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047476494

ABSTRACT:
A monolithically integrated WDM demultiplex module has a film wave guide of InGaAsP fashioned on a substrate, a photodiode of InGaAs being applied to the film wave guide. The photodiode is optically coupled to the film wave guide by a leakage coupling. A wavelength selection element in the form of a grating is provided in the surface of the film wave guide. The module can be manufactured with a single epitaxial step. Structures for increasing the crosstalk attenuation of the module and for a better coupling-in of radiation into the module are provided.

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Suhara et al., "Monolithic Integrated Microratings and Photodiodes for Wavelength Multiplexing", Appl. Phys. Lett., vol. 40, No. 2, Jan. 15, 1982, pp. 120-122.

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