Monolithically integrated temperature sensor for power semicondu

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Temperature

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257341, 257401, 257467, H01L 2358, H01L 2966

Patent

active

053048377

ABSTRACT:
A temperature sensor is monolithically integrated in a semiconductor body together with a vertical power semiconductor structure. The power semiconductor structure is formed of a plurality of power cells. The temperature sensor is formed of two sensor cells that can be manufactured simultaneously with the power cells. The advantage of the invention is that a highly sensitive temperature sensor can be manufactured in process-compatible fashion together with a vertical power semiconductor structure without additional steps and in a cost-beneficial way.

REFERENCES:
patent: 4760434 (1988-07-01), Tsuzuki et al.
patent: 5063307 (1991-11-01), Zommer

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