Monolithically integrated semiconductor structure and method of

Details Monolithically integrated semiconductor structure and method of Monolithically integrated semiconductor structure and method of

1992-11-17

1994-10-11

Lee, John D.

Coherent light generators

Particular active media

Semiconductor

257 84, 385 49, 385 52, G02B 630, H01S 325

Patent

active

053553861

ABSTRACT:
A heterostructure device includes a ridge-waveguide laser monolithically integrated with a ridge-waveguide rear facet monitor (RFM). An integral V-groove etched directly into the device substrate enables passive alignment of an optical fiber to the active region of the laser. The laser and RFM facets were formed using an in-situ multistep reactive ion etch process.

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