Coherent light generators – Particular beam control device – Modulation
Patent
1986-01-06
1988-07-19
LaRoche, Eugene R.
Coherent light generators
Particular beam control device
Modulation
372 44, 372 46, 372 50, 372 96, 372 31, 357 16, 357 17, 437129, 437225, 156662, 156649, B44C 122, C03C 1500, H01S 310, H01S 319
Patent
active
047590238
ABSTRACT:
In monolithically integrating at least two semiconductor optical devices such as, e.g., a combination of a DFB laser and a light modulator by using a multilayer semiconductor structure including an active layer of stripe form, a mesa stripe which lengthwise incorporates a portion of the active stripe is formed between and contiguous to adjacent two optical devices. The mesa stripe has neither an electrode nor a contact layer, and the multilayer structure is partially removed to expose a layer directly beneath the active layer. By this construction electrical insulation between the optical devices becomes sufficient while optical connection is established by the active stripe in the mesa stripe. The mesa stripe can easily be formed by initially preparing the multilayer semiconductor structure with a channel-like depression in the uppermost layer so as to extend above and parallel to the active stripe, once filling up the depression with a portion of a contact layer, and etching unnecessary regions of the multilayer semiconductor structure by using the contact layer in the depression as a mask.
REFERENCES:
patent: 4503541 (1985-03-01), Weller et al.
patent: 4558449 (1985-12-01), Gordon
patent: 4618959 (1986-07-01), Mito
LaRoche Eugene R.
NEC Corporation
Shingleton Michael
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