Monolithically integrated circuits having dielectrically isolate

Details Monolithically integrated circuits having dielectrically isolate Monolithically integrated circuits having dielectrically isolate

1994-08-31

1997-03-11

Kunemund, Robert

Fishing, trapping, and vermin destroying

437127, 117919, 117923, H01L 2120

Patent

active

056100957

ABSTRACT:
A fabrication technique for improved dielectric isolation of adjacent, electronic devices or electrically controllable optical devices provides an inter-device resistance in excess of 1 M.OMEGA.. Strips of a silicon oxide material, such as SiO.sub.2, are formed between the devices after device formation but prior to regrowth of an electrically conductive cap layer and subsequent metallization. The presence of the SiO.sub.2 strips prevents regrowth of the cap layer between the adjacent devices.

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Zirngibl, Martin et al., "12 frequency WDM laser based on a transmissive waveguide grating router", Electronics Letters, vol. 30, No. 9, (Apr. 28, 1994), pp. 701-702.
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Zirngibl, Martin et al., "Digitally Tunable Channel Dropping Filter/Equalizer Based on a Waveguide Grating Router and Optical Amplifier Integration", IEEE Photonics Technology Letters, vol. 6, No. 4, (Apr. 1994) pp. 513-515.

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