Monolithic waveguide/MEMS switch

Details Monolithic waveguide/MEMS switch Monolithic waveguide/MEMS switch

2006-12-26

2006-12-26

Connelly-Cushwa, Michelle (Department: 2874)

Optical waveguides

With optical coupler

Switch

C385S001000, C385S014000

Reexamination Certificate

active

07155083

ABSTRACT:
A monolithic waveguide/MEMS switch is disclosed that has a waveguide portion and a MEMS mirror portion fabricated on a single substrate, such as a as a silicon-on-insulator wafer. The monolithic waveguide/MEMS switch adjusts the phase of an optical signal by varying the position of one or more moveable mirrors. The mirror portion includes a mirror having a reflective surface that is attached to at least one MEMS actuator to achieve in-plane motion of the mirror (moves parallel to a plane of said at least one waveguide). In one implementation, the MEMS actuator is embodied as a known comb drive actuator. The phase adjustment techniques of the present invention may be employed in various optical devices, including wavelength selective optical switches that support multiple optical channels.

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