Monolithic structure for storing electrical charges

Electrical transmission or interconnection systems – Electrets

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H01G 702

Patent

active

041490959

ABSTRACT:
An electret consisting of a conductive electrode embedded in insulating materials, is provided. In comparison with conventional electrets comprising a dielectric storage member, this electret exhibits a much higher capacity. Moreover it can be manufactured together with an integrated circuit incorporating the structure according to the invention, onto its substrate. For charging the electret an electrolytic process is utilized, if necessary through an opening perforated in the upper insulating layer. In the latter case the metal constituting the electrode can be advantageously be oxidized by anodic oxidation. The lifetime is improved by the oxide layer.

REFERENCES:
patent: 3257592 (1966-06-01), Maissel
patent: 3354373 (1967-11-01), Fatovic
patent: 3797000 (1974-03-01), Augusta et al.
patent: 3946422 (1976-03-01), Yagi et al.

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