Electrical generator or motor structure – Dynamoelectric – Linear
Reexamination Certificate
2008-12-31
2011-12-27
Le, Dang D (Department: 2834)
Electrical generator or motor structure
Dynamoelectric
Linear
Reexamination Certificate
active
08084896
ABSTRACT:
A magnetically levitated monolithic stage positioning system includes linear three phase motors and coil windings connected to the monolithic stage that interact with a ferromagnetic base. The linear three phase motors may be excited to provide motion in an X-axis direction, motion in a Y-axis direction, and rotation about a Z-axis. The monolithic stage is levitated on an air bearing. The plurality of coil windings connected to the monolithic stage may serve to magnetically preload the air bearing. The plurality of coil windings may be excited to provide motion in a Z-axis direction and rotation of the monolithic stage about the X-axis and about the Y-axis.
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Electro Scientific Industries Inc.
Le Dang D
Stoel Rives LLP
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