Monolithic silicon intra-ocular pressure sensor and method there

Details Monolithic silicon intra-ocular pressure sensor and method there Monolithic silicon intra-ocular pressure sensor and method there

1998-09-01

2000-01-04

O'Connor, Cary

Surgery

Diagnostic testing

Measuring fluid pressure in body

603398, 604 19, A61B 500

Patent

active

060104619

ABSTRACT:
A silicon monolithic miniature intra-ocular pressure sensing probe utilizes pressure sensing piezoresistors attached to a silicon pressure sensing membrane which is directly exposed to the irrigating fluid used during an eye operation, for example. From a silicon fabrication point of view, this is a micro electromechanical (MEM) device and the integration of the piezoresistive pressure sensor directly into the cannula which is inserted into the eye is partially made possible by providing p++ etch stops to gain access for electrical connection to the piezoresistive elements arranged in a Wheatstone bridge configuration. The silicon sensing membrane forms a smooth surface to avoid turbulence and is close to the eye to minimize error.

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