Monolithic semiconductor structure of a laser and a field effect

Coherent light generators – Particular component circuitry – Optical pumping

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357 16, 357 17, 357 4, 357 232, 357 41, 372 50, 372 46, 372 47, H01L 3112, H01L 29761, H01L 3300, H01S 319

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active

047664720

ABSTRACT:
A monolithic semiconductor structure of a laser and a field effect transistor applicable to telecommunications comprises, on a semiinsulating substrate, a semiconductor layer of Ga.sub.1-x Al.sub.x As, a N-doped semiconductor layer of Ga.sub.1-y Al.sub.y As, a semiconductor layer of Ga.sub.1-z Al.sub.z As, in which x and z vary from 0.2 to 0.7 and y from 0 to 0.15 and a GaAs semiconductor layer. In these four layers are formed one type P region and two type N regions, the type P region and one of the type N regions defining between them the active zone of the laser and the two type N regions defining between them the active zone of the transistor, respectively forming the transistor source and drain. The P region of the laser is equipped with an electrode and the transistor source and drain with ohmic contacts. A process for making the structure as also disclosed.

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