Monolithic quartz resonator accelerometer

Details Monolithic quartz resonator accelerometer Monolithic quartz resonator accelerometer

1989-02-28

1994-05-31

Moskowitz, Nelson

Measuring and testing

Speed, velocity, or acceleration

Structural installation or mounting means

73517AV, 73488, 367165, 367173, 310348, H01L 21306, H01L 4100

Patent

active

053158741

ABSTRACT:
A monolithic quartz resonator accelerometer including a monolithic quartz sensing structure with a frame, a proof mass support structure within the frame, and a resonator structure interconnecting the frame and the support structure. Further included are a proof mass fixed to the support structure, and electrodes on the resonator structure for driving the resonator at a vibration frequency which varies as a function of the acceleration of the proof mass.

REFERENCES:
patent: 4670092 (1987-06-01), Motamedi
patent: 4804875 (1989-02-01), Albert
patent: 4851080 (1989-07-01), Howe et al.

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