Etching a substrate: processes – Forming or treating thermal ink jet article
Reexamination Certificate
2007-10-09
2007-10-09
Norton, Nadine (Department: 1765)
Etching a substrate: processes
Forming or treating thermal ink jet article
C347S054000
Reexamination Certificate
active
10845332
ABSTRACT:
An actuating assembly (50) for ink jet printheads consists of a silicon die (61), which comprises a groove (45) and a lamina (64), and of a structure (75) produced monolithically in the same production process. The actuating assembly (50) comprises a microhydraulics (63), the latter in turn comprising a plurality of channels (67) and chambers (57), made inside the structure (75) by means of a sacrificial metallic layer (54). A conducting layer (26) forms a single interconnected equipotential network used as the electrode during the processes of electrochemical etch stopping on the groove (45), of electrodeposition of the sacrificial layer (54) and of the latter's subsequent removal.
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Conta Renato
Piano Mara
Dahimene Mahmoud
Kinberg Robert
Norton Nadine
Schwarz Steven J.
Telecom Italia S.p.A.
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