Fishing – trapping – and vermin destroying
Patent
1989-08-21
1990-12-11
Hearn, Brian E.
Fishing, trapping, and vermin destroying
437 31, 437 32, 437901, 73727, H01L 2170, H01L 21265
Patent
active
049771019
ABSTRACT:
A monolithic pressure sensitive silicon integrated circuit is formed by first providing a localized etch-stop layer on one surface of the silicon chip, then growing successive epitaxial layers of opposite conductivity types over this surface. In the upper of the two layers, there is formed a bridge of four piezoresistors overlying the periphery of the etch-stop layer and the conditioning circuitry for amplifying the output of the bridge including both lateral and vertical junction transistors. The back surface of the chip is etched anisotropically to form a cavity that leaves a thin diaphragm underlying the bridge of the four piezoresistors.
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Brown Ronald E.
Hornback Donald L.
Leisure Ronald K.
Stevenson Paul E.
Yoder Douglas J.
Delco Electronics Corporation
Hearn Brian E.
Holtzman Laura M.
Wallace Robert J.
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