Monolithic passive component

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Passive components in ics

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257516, 257533, 257535, 257521, 257622, 437228, 437919, 437927, H01L 2900, H01L 21465

Patent

active

055392415

ABSTRACT:
An integrated circuit having a monolithic device such as an inductor suspended over a pit in the substrate to reduce parasitic capacitances and enhance the self-resonant frequency of the inductor.

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H. M. Greenhouse, "Design of Planar Rectangular Microelectronic Inductors", IEEE Transaction on Parts, Hybrids and Packaging, PHP-10, pp. 101-109, Jun. 1974.
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J. C. Marshall, M. Parameswaran, M. E. Zaghloul and M. Gaitan, "High-Level CAD Melds Micromachined Devices with Foundries", IEEE Circuits and Devices Magazine, vol. 8, No. 6, pp. 10-17, Nov. 1992.

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