Coherent light generators – Particular active media – Semiconductor
Patent
1990-05-11
1991-07-02
Epps, Georgia
Coherent light generators
Particular active media
Semiconductor
372 45, H01S 319
Patent
active
050291769
ABSTRACT:
A one or two dimensional integrated array of multiple-wavelength, vertical-cavity lasers and its method of making. All lasers are simultaneously formed on a common substrate by the sequential vertical growth of a lower reflector, a lower spacer, an active light emitting region, an upper spacer and an upper reflector. Resonant cavities are formed between the upper and lower reflectors, the optical lengths of which determine the lasing wavelengths. According to the invention, during the growth of at least part of this vertical structure, the growth is made controllably non-uniform over the substrate, thereby providing a spatial variation over the substrate of the resonant cavity length. Such non-uniform deposition may be achieved by deposition from an off-normal source onto a stationary substrate, by thermal gradients in the substrate or by diffusion limited growth onto mesas or valleys of different widths.
REFERENCES:
patent: 4949350 (1990-08-01), Jewel et al.
M. Nakao et al., "1.5 .mu.m DBF Laser Array with .lambda./4-Shifted First-Order Gratings Fabricated by X-Ray Lithography", Electronics Letters, vol. 25, Jan. 19, 1989, pp. 148-149.
K. Tai et al., "Use of Implant Isolation for Fabrication of Vertical Cavity Surface-Emitting Laser Diodes", Electronics Letters, vol. 25, No. 23, 1989, pp. 1644-1645.
D. E. Bossi et al., "Reduced-Confinement Antennas for GaAlAs Integrated Optical Waveguides", Applied Physics Letters, vol. 56, Jan. 29, 1990, pp. 420-422.
K. M. Dzurko et al., "Temperature Engineered Growth of Low-Threshold Quantum Well Lasers by Metalorganic Chemical Vapor Deposition", Applied Physics Letters, vol. 54, pp. 105-107, Jan. 9, 1989.
Bell Communications Research Inc.
Epps Georgia
Falk James W.
Guenzer Charles S.
Suchyta Leonard Charles
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