Monolithic multiaxis interferometer

Details Monolithic multiaxis interferometer Monolithic multiaxis interferometer

2005-04-05

2005-04-05

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S492000

Reexamination Certificate

active

06876451

ABSTRACT:
A multi-axis interferometer includes a multiplexer portion and a beam splitter portion integrated into the same optically transmissive monolith. The multiplexer portion is configured to split an input beam into a corresponding plurality of intermediate beams, each of which is directed toward the beam splitter portion through a corresponding output port of the multiplexer portion. The beam splitter portion is configured to separate the intermediate beam into a measurement component and a reference component.

REFERENCES:
patent: 4746216 (1988-05-01), Sommargren
patent: 4752133 (1988-06-01), Sommargren
patent: 4802764 (1989-02-01), Young et al.
patent: 4802765 (1989-02-01), Young et al.
patent: 4859066 (1989-08-01), Sommargren
patent: 4881815 (1989-11-01), Sommargren
patent: 4881816 (1989-11-01), Zanoni
patent: 4883357 (1989-11-01), Zanoni et al.
patent: 4890921 (1990-01-01), Pond et al.
patent: 5056921 (1991-10-01), Chaney
patent: 5064289 (1991-11-01), Bockman
patent: 5801832 (1998-09-01), Van Den Brink
patent: 6020964 (2000-02-01), Loopstra et al.
patent: 6084673 (2000-07-01), Van Den Brink et al.
patent: 6163379 (2000-12-01), de Groot
patent: 6542247 (2003-04-01), Bockman

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