Monolithic multi-functional integrated sensor and method for...

Details Monolithic multi-functional integrated sensor and method for... Monolithic multi-functional integrated sensor and method for...

2006-05-30

2006-05-30

Oen, William (Department: 2855)

Measuring and testing

Fluid pressure gauge

With pressure and/or temperature compensation

C073S727000

Reexamination Certificate

active

07051595

ABSTRACT:
A monolithic multi-functional integrated sensor and method for making the monolithic multi-functional integrated sensor. The monolithic multi-functional integrated sensor includes: a pressure sensor including a plurality of piezoresistors having resistance values which vary with a change in external pressure, the piezoresistors being disposed in a direction so as to be subject to a piezoresistive effect produced by the external pressure at or beyond a predetermined first level; and a temperature sensor including a resistor having a resistance value which varies with a change in temperature, the resistor being disposed in a direction so as to be subject to a piezoresistive effect produced by the external pressure below a predetermined second level.

REFERENCES:
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patent: 5583295 (1996-12-01), Nagase et al.
patent: 6748635 (2004-06-01), Sumi et al.
patent: 2002-48607 (2002-02-01), None
patent: 2004-85304 (2004-03-01), None

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