Monolithic microwave power sensor using a heat sensing diode jun

Details Monolithic microwave power sensor using a heat sensing diode jun Monolithic microwave power sensor using a heat sensing diode jun

1993-02-26

1994-04-12

Swann, Tod R.

Thermal measuring and testing

Temperature measurement

In spaced noncontact relationship to specimen

374178, 324 95, 324106, G01J 518

Patent

active

053020243

ABSTRACT:
A monolithic integrated circuit power sensor provides a monolithic integrated circuit substrate, a conversion element formed either on or in the substrate for converting microwave energy into heat, and a thermally sensitive diode junction formed in sufficiently close proximity to the conversion element to be thermally coupled thereto.

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DC to 40 GHz MMIC Power Sensor, Oct. 7, 1990, 1990 IEEE GaAs IC Symposium.

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