Monolithic microwave power sensor

Thermal measuring and testing – Temperature measurement – In spaced noncontact relationship to specimen

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338 9, 338 20, 338308, 338 27R, 324106, 257467, 257528, H01L 2966

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053704584

ABSTRACT:
A monolithic integrated circuit power sensor provides a monolithic integrated circuit substrate a conversion element formed either on or in the substrate for converting microwave energy into heat, an electrically insulating dielectric layer affixed to the conversion element, and an integrated circuit, heat sensitive element formed in sufficiently close proximity to the conversion element to be thermally coupled thereto through the dielectric layer for sensing temperature changes in the conversion element.

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Gupth, J. P. and Sachdev, R. N. "A Microwave Radiation Monitor," Journal of Applied Meterology, vol. 15, No. 9, pp. 1023-1026, Sep. 76.
DC to 40 GHz MMIC Power Sensor, Oct. 7, 1990, 1990 IEEE GaAs IC Symposium.

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