Monolithic microwave circuit with thick conductors

Fishing – trapping – and vermin destroying

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437 21, 437 51, H01L 21786

Patent

active

056521731

ABSTRACT:
A monolithic microwave integrated circuit (MMIC) is produced by a method which forms multilevel conductive members, including thick low-loss metallic members. The low-loss metallic members are particularly useful for forming inductors and interconnecting circuit components. The MMIC is formed on a thick oxide layer of a silicon-on-insulator structure having a high-resistivity silicon substrate to inhibit RF interaction with the substrate.

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