Monolithic micromechanical tuning fork angular rate sensor

Details Monolithic micromechanical tuning fork angular rate sensor Monolithic micromechanical tuning fork angular rate sensor

1995-06-07

1998-08-18

Chapman, John E.

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

438 50, G01P 904

Patent

active

057960011

ABSTRACT:
A monolithic, micromechanical tuning fork gyroscope is fabricated from a unitary silicon substrate utilizing etch stop diffusions and selective anisotropic etching. A non-etched silicon structure is suspended over the selectively etched pit. The non-etched silicon structure includes at least first and second vibratable structures. Each vibratable structure is energizable to vibrate laterally along an axis normal to the rotation sensitive axis. The lateral vibration of the first and second vibratable structures effects simultaneous vertical movement of at least a portion of the non-etched silicon structure upon the occurrence of angular rotation of the gyroscope about the rotation sensitive axis. The vertical movement of the non-etched silicon structure is sensed, and a voltage proportional to the movement is generated, for providing an indication of angular rate of rotation detected by the gyroscope.

REFERENCES:
patent: 4598585 (1986-07-01), Boxenhorn
patent: 4654663 (1987-03-01), Alsenz et al.
patent: 5576250 (1996-11-01), Diem et al.

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