Monolithic integrated circuit die heater and methods for using s

Details Monolithic integrated circuit die heater and methods for using s Monolithic integrated circuit die heater and methods for using s

1998-09-11

2000-04-04

Jeffery, John A.

Electric heating

Heating devices

Combined with diverse-type art device

338306, 257536, 438382, H01L 2166

Patent

active

06046433&

ABSTRACT:
The invention provides an integrated circuit die containing a metal heater resistor. In an embodiment of the invention, the metal heater resistor is disposed around the periphery of the die, with one end of the metal heater resistor connected to a first bond pad, and the other end of the heater resistor connected to a second bond pad. In alternative embodiments, metal-to-substrate contacts disposed along the heater resistor between the first and second ends provide improved thermal contact between the heater resistor and the die substrate. In other alternative embodiments, the metal heater resistor is disposed around the periphery of a circuit whose temperature coefficient is to be measured, such as a voltage reference circuit that is included as part of a larger integrated circuit containing other circuitry.

REFERENCES:
patent: 4356379 (1982-10-01), Graeme
patent: 4730160 (1988-03-01), Cusack et al.
patent: 4734641 (1988-03-01), Byrd, Jr. et al.
patent: 5268589 (1993-12-01), Dathe
patent: 5309090 (1994-05-01), Lipp
Reilly, D.F. et al, "Self-Contained Chip Heater", IBM Tech. Disclosure Bulletin, vol. 14, No. 6, Nov. 1971.
Yu, C.C., "Self-Heating Test Chip for Reliability Life Test", IBM Tech. Disclosure Bulletin, vol. 25, No. 7B, Dec. 1982.
Benson, D.A., et al., "Design and Characterization of Microscale Heater Structures for Test Die and Sensor Applications", Itherm '98, 6th Inter. Soc. Conf. on Therm. Phenom., p. 434-441 of xv, 1998.
Robert C. Dobkin, "On-Chip Heater Helps To Stabilize Monolithic Reference Zener," Electronics, 49:No. 19, pp. 106-112, Sep. 1976.

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