Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Electromagnetic or particle radiation
Patent
1995-03-03
1997-09-23
Tran, Minh-Loan
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Electromagnetic or particle radiation
257446, 257458, 257461, 2502081, 250332, 25037014, H01L 3100
Patent
active
056708173
ABSTRACT:
Methods are disclosed for fabricating a monolithic array of radiation detectors and associated readout circuits, as are monolithic arrays fabricated by the methods. One method includes the steps of (a) providing a first substrate (10) having a first major surface (10a) and an oppositely disposed second major surface (10b); (b) doping the first major surface with a dopant having a first type of electrical conductivity to form a first doped region (12) adjacent to the first major surface; (c) forming an electrically insulating dielectric layer (14) on the first major surface; (d) thermally bonding a second substrate to the dielectric layer and thinning the second substrate to provide a semiconductor layer (16) having a predetermined thickness; (e) delineating the semiconductor layer into a plurality of adjacently disposed electrically isolated regions each of which corresponds to a radiation detector unit cell; (f) fabricating a readout integrated circuit (17) within a portion of the semiconductor layer within each of the unit cells; (g) conductively coupling (22, 23) each of the readout integrated circuits to an underlying portion of the first doped region; and (h) doping the second major surface with a dopant having a second type of electrical conductivity to form a second doped region (24) adjacent to the second major surface. The second major surface is a radiation receiving surface of the monolithic array.
REFERENCES:
patent: 5155362 (1992-10-01), Baker
patent: 5244817 (1993-09-01), Hawkins et al.
"Bonded Wafer Substrates for Integrated Detector Arrays", J.J. Wang et al., IEEE Transactions on Nuclear Science, vol. 40, No. 5, Oct. 1993.
Denson-Low W. K.
Santa Barbara Research Center
Schubert W. C.
Tran Minh-Loan
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