Fishing – trapping – and vermin destroying
Patent
1993-05-10
1994-10-04
Breneman, R. Bruce
Fishing, trapping, and vermin destroying
437107, 437126, 437133, 437128, 437129, 333 20, 257274, 257480, H01L 21203
Patent
active
053526279
ABSTRACT:
A process for fabricating sequential inductors and varactor diodes of a monolithic, high voltage, nonlinear, transmission line in GaAs is disclosed. An epitaxially grown laminate is produced by applying a low doped active n-type GaAs layer to an n-plus type GaAs substrate. A heavily doped p-type GaAs layer is applied to the active n-type layer and a heavily doped n-type GaAs layer is applied to the p-type layer. Ohmic contacts are applied to the heavily doped n-type layer where diodes are desired. Multiple layers are then either etched away or Oxygen ion implanted to isolate individual varactor diodes. An insulator is applied between the diodes and a conductive/inductive layer is thereafter applied on top of the insulator layer to complete the process.
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Breneman R. Bruce
Grzybicki Daryl S.
Paladugu Ramamohan R.
Sartorio Henry P.
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