Monolithic high-voltage capacitor

Details Monolithic high-voltage capacitor Monolithic high-voltage capacitor

1992-02-14

1993-02-16

Griffin, Donald A.

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

257646, 257532, H01G 406, H01L 2702

Patent

active

051876370

ABSTRACT:
A high voltage capacitor structure for integrated circuits or the like. The capacitor includes a provision for equalizing charge when multiple capacitors are series coupled. Charge is equalized by a SiN layer overlaying, and in contact with one terminal of, the capacitor. A ground ring surrounds the capacitor structure and is also overlayed by, and in contact with, the SiN layer.

REFERENCES:
patent: 3273033 (1966-09-01), Rossmeisl
patent: 4167018 (1979-09-01), Ohba et al.
patent: 4805071 (1989-02-01), Hutter et al.
patent: 4949154 (1990-08-01), Haken
"A model describing the electrical behavior of a-SiN:H alloys", J. App. Phys., 60(4), Aug. 15, 1986 J. W. Osenbach and W. R. Knolle pp. 1408 through 1416.

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