Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Electromagnetic or particle radiation
Patent
1989-09-25
1994-05-24
Nelson, Peter A.
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Electromagnetic or particle radiation
257452, 437 83, 437203, H01L 2713
Patent
active
053151470
ABSTRACT:
An integrated circuit wafer is formed as a monolithic focal plane array having signal processing circuitry formed upon a first surface thereof and infrared detector elements formed upon a second surface thereof. A process for forming the same is also disclosed. The wafer has an array of waffle-like hollows formed upon one surface. The floor of each hollow has a dense array of small diameter vias formed thereon. The vias extend through the wafer to the second surface thereof. Conductive conduits are formed through the hollows and vias to connect infrared detectors on the second side of the wafer to their associated signal processing circuitry formed upon the first side of the wafer.
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Grumman Aerospace Corporation
Nelson Peter A.
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