Monolithic detector array apparatus

Details Monolithic detector array apparatus Monolithic detector array apparatus

1994-01-25

1995-08-29

Hannaher, Constantine

Radiant energy

Infrared-to-visible imaging

Including detector array

2503384, 25037008, G01J 520, H01L 3109

Patent

active

054462843

ABSTRACT:
A monolithic detector array apparatus for sensing infrared radiation. An array of semiconductor diode bolometers are fabricated on micromachined thermal isolation structures called microbridges. The detectors are configured in an array and addressed by row and column. Readout circuitry may be optionally incorporated onto a common substrate. The monolithic detector array may be highly integrated, resulting in a low cost and a high performance focal plane array.

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Japanese Abstract 57. 104380 Jun. 1982.

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