Monolithic circuit with integrated bulk structure resonator

Details Monolithic circuit with integrated bulk structure resonator Monolithic circuit with integrated bulk structure resonator

1991-04-08

1993-11-09

Hille, Rolf

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

257415, 257416, 257619, H01L 2966, H01L 2996

Patent

active

052605965

ABSTRACT:
A structure is provided to integrate bulk structure resonators into a monolithic integrated circuit chip. The chip also contains the remaining circuit components (17, 21, 24) required for the desired system function. Micromachining techniques are used to fabricate both support and a cavity (11, 27, 28) which allows mechanical vibration without interference. Alternative embodiments incorporate the use of non-piezoelectric mechanical resonators (14), quartz crystal resonators (18) and thin film piezoelectric resonators (22). Each type of resonator is used for the range of frequencies to which it is suited, providing a family of monolithic resonators capable of being used with integrated circuits having operating frequencies from a few hundred hertz to over 500 Mhz.

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Chen et al., "Integrated Silicon Microbeam PI-FET Accelerometer", IEEE Trans. on Elec. Dec., vol. ED-29, No. 1, Jan. 1982.
Petersen et al., "Micromechanical Accelerometer Integrated with MOS Detection Circuitry", IEEE Trans. on Elec. Dec., vol. ED-29, No. 1, Jan. 1982.
Petersen, "Micromechanical Membrane Switches on Silicon," IBM J. Res. Develop., vol. 23, No. 4, Jul. 1979.

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