Monolithic chemical sensor of the CHEMFET type incorporating an

Details Monolithic chemical sensor of the CHEMFET type incorporating an Monolithic chemical sensor of the CHEMFET type incorporating an

1989-10-05

1991-12-31

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437 41, 357 25, 324 715, 204416, 204418, H01L 2100, H01L 2102, H01L 21230

Patent

active

050772295

ABSTRACT:
The sensor comprises a chip of a semiconductor material wherein a field-effect transistor is formed the drain and source regions whereof are provided on a first face of the chip, onto which an ion-selective membrane is applied which is coupled to said field-effect transistor.
The membrane covers said first face of the chip completely, and terminals are provided in addition which comprise conductive elements applied to the other face of the chip and being connected to said drain and source regions by connections which extend through the chip.
These connections are formed by a method providing for the formation in the chip of buried layers of semiconductor material.

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