Monolithic beam splitter mirror arrangement

Details Monolithic beam splitter mirror arrangement Monolithic beam splitter mirror arrangement

1974-09-26

1976-06-15

Corbin, John K.

Optics: measuring and testing

Refraction testing

Prism engaging specimen

356172, 350 30, 350169, G01B 1124, G02B 2710

Patent

active

039633535

ABSTRACT:
A beam splitter is incorporated as one of the mirrors in a three mirror folding array in a projection system for exposing wafers used in making micro circuits. Through the use of the beam splitter, it is possible to view the wafer for alignment purposes while avoiding the drawbacks of viewing through the back of the master which is being imaged on the wafer.

REFERENCES:
patent: 2765704 (1956-10-01), Mottu
patent: 3718396 (1973-02-01), Hennings

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