Monocrystal growing apparatus

Details Monocrystal growing apparatus Monocrystal growing apparatus

1990-07-26

1991-10-22

Chaudhuri, Olik

Chemical apparatus and process disinfecting, deodorizing, preser

Physical type apparatus

Crystallizer

156606, 15662073, 156DIG64, C30B 1304, C30B 3500

Patent

active

050594010

ABSTRACT:
A monocrystal growing apparatus having a separator provided in a chamber-defining housing for separating the part of a polycrystal rod supported by a vertical shaft, to produce a melt between the polycrystal rod and a seed crystal, from the doping gas atmosphere used during the melting operation. The separator is open to the chamber near the melt and a device passed an inert gas into the separator to prevent the doping gas from invading the chamber. The apparatus produces a monocrystal rod of a constant resistivity along its rod.

REFERENCES:
patent: 3477959 (1969-11-01), Colton
patent: 3488157 (1970-01-01), Koffer
patent: 4039283 (1977-08-01), Keller
patent: 4270972 (1981-06-01), Crouse
patent: 4752451 (1988-06-01), Aubert et al.
patent: 4956153 (1990-09-01), Yamagishi et al.
IBM Technical Disclosure Bulletin, vol. 28, No. 1, Jun. 1985, Apparatus For Low To Medium Level Oxygen Czochralski Silicon Crystal Growth.

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