Optical: systems and elements – Having significant infrared or ultraviolet property – Multilayer filter or multilayer reflector
Reexamination Certificate
2007-02-06
2007-02-06
Robinson, Mark A. (Department: 2872)
Optical: systems and elements
Having significant infrared or ultraviolet property
Multilayer filter or multilayer reflector
C359S584000
Reexamination Certificate
active
10505550
ABSTRACT:
The invention relates to a monochromator mirror for the EUV-spectral range, provided with a layer arrangement placed on a substrate, comprising a periodic sequence of two individual layers (A, B) made of different material forming a period having a thickness d in the form of a spacer-layer or an absorber-layer, whereby the reflectivity of the second or a higher Bragg-order is used. Said thickness d has a dimensional deviation of a maximum of 3% and the ratio of the layer thickness of the absorber-layer to the period thickness is smaller than the ratio of 0.8 of the used order of the Bragg-Reflexion.
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Benbalagh, et al., Fabrication and characterization of a Mo/Si multilayer monochromator with a narrow spectral bandwidth in the xuv domain; Nuclear Instruments and Methods in Physics Research A 458 (2001) 650-655.
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Feigl Torsten
Kaiser Norbert
Kuhlmann Thomas
Yulin Sergey
Consilvio Mark
Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung
Marshall & Melhorn LLC
Robinson Mark A.
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