Mono, di- and trifluoroacetate substituted silanes

Details Mono, di- and trifluoroacetate substituted silanes Mono, di- and trifluoroacetate substituted silanes

1996-12-05

1999-09-07

Shaver, Paul F.

Organic compounds -- part of the class 532-570 series

Organic compounds

Silicon containing

C07F 708

Patent

active

059489286

ABSTRACT:
Silane compounds are described having the formula:

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Homma, T., "Properties of Fluorinated Silicon Oxide Films Formed Using Fluorotriethoxysilane for Interlayer Dielectrics in Multilevel Interconnections," J. Electrochem. Soc., 143(3):1084-1087 (1996).
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