Radiant energy – Invisible radiant energy responsive electric signalling – Infrared responsive
Reexamination Certificate
2008-04-01
2008-04-01
Porta, David (Department: 2884)
Radiant energy
Invisible radiant energy responsive electric signalling
Infrared responsive
Reexamination Certificate
active
07351976
ABSTRACT:
The present invention relates to a semiconductor processing system that employs infrared-based thermopile detector for process control, by analyzing a material of interest, based on absorption of infrared light at a characteristic wavelength by such material. Specifically, an infrared light beam is transmitted through a linear transmission path from an infrared light source through a sampling region containing material of interest into the thermopile detector. The linear transmission path reduces the risk of signal loss during transmission of the infrared light. The transmission path of the infrared light may comprise a highly smooth and reflective inner surface for minimizing such signal loss during transmission.
REFERENCES:
patent: 4647777 (1987-03-01), Meyer
patent: 4816294 (1989-03-01), Tsuo et al.
patent: 4935345 (1990-06-01), Guilbeau et al.
patent: 5047352 (1991-09-01), Stetter et al.
patent: 5282473 (1994-02-01), Braig et al.
patent: 5367167 (1994-11-01), Keenan
patent: 5404125 (1995-04-01), Mori et al.
patent: 5464983 (1995-11-01), Wang
patent: 5589689 (1996-12-01), Koskinen
patent: 5594248 (1997-01-01), Tanaka
patent: 5650624 (1997-07-01), Wong
patent: 5721430 (1998-02-01), Wong
patent: 5782974 (1998-07-01), Sorensen et al.
patent: 5834777 (1998-11-01), Wong
patent: 5962854 (1999-10-01), Endo
patent: 5967992 (1999-10-01), Canfield
patent: 6045257 (2000-04-01), Pompei et al.
patent: 6348650 (2002-02-01), Endo et al.
patent: 6370950 (2002-04-01), Lammerink
patent: 6469303 (2002-10-01), Sun et al.
patent: 6617175 (2003-09-01), Arno
patent: 6649994 (2003-11-01), Parsons
patent: 6694800 (2004-02-01), Weckstrom et al.
patent: 6821795 (2004-11-01), Arno
patent: 6828172 (2004-12-01), Chavan et al.
patent: 6909093 (2005-06-01), Sato et al.
patent: 7009267 (2006-03-01), Honboh
patent: 7011614 (2006-03-01), Arno
patent: 7033542 (2006-04-01), Archibald et al.
patent: 2002/0051132 (2002-05-01), Ohno et al.
patent: 2004/0038442 (2004-02-01), Kinsman
patent: 2004/0058488 (2004-03-01), Arno
patent: 2004/0113080 (2004-06-01), Arno
patent: 2004/0121494 (2004-06-01), Arno
patent: 2005/0211555 (2005-09-01), Archibald
patent: 2006/0219923 (2006-10-01), Uchida et al.
patent: 2006/0263916 (2006-11-01), Arno
Adrian, Peter, Sensor industry developments and trends, Sensor Business Digest, Oct. 2001, Publisher: Vital Information Publication.
IEEE, The Authoritative Dictionary of IEEE Standard Terms, Seventh Edition, Jan. 2001, pp. 1174, Publisher: The Institute of Electrical and Eletronics Engineers, Inc.
Schilz, Jügen, Applications of thermoelectric infrared sensors (thermopiles): Gas detection by infrared absorption; NDIR, Thermophysica Minima, Aug. 22, 2000, Publisher: PerkinElmer.
Thermometrics Global Business, Application note of thermopile sensors (Rev.02), 2000, pp. 1-9.
Wilks, Paul A., The birth of infrared filtometry, Spectroscopy Showcase—www.spectroscopyonline.com, Mar. 2002.
Advanced Technology & Materials Inc.
Gustafson Vincent K.
Intellectual Property / Technology Law
Lin Chih-Sheng
Porta David
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