Monitoring slot formation in substrates

Electric heating – Metal heating – By arc

Reexamination Certificate

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C219S121670, C219S121720, C219S121830, C219S121710

Reexamination Certificate

active

11180369

ABSTRACT:
A light beam is used to cut a slot in a first side of substrate. An optical sensor monitors a surface of a second side of the substrate that is opposite the first side while cutting the slot. If the light beam breaks through the surface of the second side, the sensor detects the light beam.

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