Monitoring erosion of system components by optical emission

Details Monitoring erosion of system components by optical emission Monitoring erosion of system components by optical emission

2005-05-17

2005-05-17

Smith, Zandra (Department: 2877)

Optics: measuring and testing

With plural diverse test or art

C356S316000, C250S459100

Reexamination Certificate

active

06894769

ABSTRACT:
A method and system are provided for monitoring erosion of system components in a plasma processing system. The system components contain emitters that are capable of producing characteristic fluorescent light emission when exposed to a plasma. The method utilizes optical emission to monitor fluorescent light emission from the emitters for determining system component status. The method can evaluate erosion of system components in a plasma, by monitoring fluorescent light emission from the emitters. Consumable system components that can be monitored using the method include rings, shields, electrodes, baffles, and liners.

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