Communications: electrical – Continuously variable indicating – Condition responsive
Reexamination Certificate
2005-07-11
2009-10-20
Pham, Toan N (Department: 2612)
Communications: electrical
Continuously variable indicating
Condition responsive
C414S217000, C257S414000, C073S865900
Reexamination Certificate
active
07605718
ABSTRACT:
A device that fits inside a transport pod communicating with the slots of the transport pod so that the device can be inserted and removed from the transport pod. The transport pods are for silicon wafers. The device has sensors that monitor the environment within the transport pod. Depending on the device's size, silicon wafers may be able to accompany the device so that the device can monitor the precise environment the silicon wafers are exposed to while inside the transport pod. The device may also be placed in a transport pod and run through the manufacturing process as one transport pod in a series. The results on the environmental monitoring can be used for alarms and monitoring or data logging to improve the yield of the silicon wafers.
REFERENCES:
patent: 6884639 (2005-04-01), Dougan et al.
patent: 2002/0124906 (2002-09-01), Suzuki et al.
patent: 2004/0267501 (2004-12-01), Freed et al.
patent: WO 98/59229 (1998-12-01), None
Newman Paul
Pochy Rocco D.
Polen Morgan
Salton Scott H.
Saunders Thomas C.
Greenberg & Lieberman LLC
Greenberg Esq. Michael L.
Hunnings Travis R
Lighthouse Worldwide Solutions, Inc.
Pham Toan N
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