Monitoring device for crystal pulling apparatus

Details Monitoring device for crystal pulling apparatus Monitoring device for crystal pulling apparatus

1974-09-30

1977-03-29

Emery, Stephen J.

Chemistry: physical processes

Physical processes

Crystallization

156601, 156617SP, 240 2LC, 240 2M, 350 96R, 350319, 356 44, B01J 1718

Patent

active

040146561

ABSTRACT:
An improved monitoring device for monitoring a crystal pulling process taking place in a high pressure drawing chamber in which the mounting for a high pressure window at the same time encloses the end of a quartz rod whose other end projects freely into the drawing chamber ending in the vicinity of the melt with the mount inserted into the device in a pressure tight manner using a nipple threaded into the drawing chamber, the monitoring device permitting good observation of the process without precipitation of the volatile element of the semiconductor compound on the high pressure window.

REFERENCES:
patent: 2912321 (1959-01-01), Brennan
patent: 3051035 (1962-08-01), Root
patent: 3051038 (1962-08-01), Duke
patent: 3291650 (1968-12-01), Dohmen
patent: 3692499 (1972-09-01), Andrychuck
patent: 3718757 (1973-02-01), Gulitz
patent: 3745834 (1973-07-01), Veltze
patent: 3865554 (1975-02-01), Wenkus
IBM Tech. Discl. Bulletin (Corburn), vol. 15, No. 4, Sept., 1972, pp. 1334-1335.

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