Communications: electrical – Condition responsive indicating system – Specific condition
Patent
1997-04-22
1998-12-01
Crosland, Donnie L.
Communications: electrical
Condition responsive indicating system
Specific condition
340661, 340686, 417 1, 417 63, 417 447, 417279, 222 1, 137 2, 137 152, 73861, 3644791, G08B 2100
Patent
active
058444904
ABSTRACT:
A monitoring device for a chemical reagent supply system includes a position voltage generator, mounted to a pump of the supply system, to monitor the expansion state of a bellows. The actual outflow of the chemical reagent is calculated by the position voltage generator. According to a demand signal from equipment needing the chemical reagent, which is processed to consider the viscosity of the chemical reagent, a theoretic demand outflow is calculated by the monitoring device. When the difference between the actual outflow and the theoretic demand outflow exceeds a permissible tolerance, the monitoring device raises an alarm signal to warn an operator and thereby to assure the accuracy of the chemical reagent supply system.
REFERENCES:
patent: 5033321 (1991-07-01), Gerson
patent: 5421208 (1995-06-01), Packard et al.
patent: 5433237 (1995-07-01), Kao et al.
patent: 5695092 (1997-12-01), Schrandt
Lee His-Huang
Liu Eric
Lu Chung-Chien
Lu Tien-Tsai
Crosland Donnie L.
United Microelectronics Corp.
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