Photocopying – Projection printing and copying cameras – With developing
Reexamination Certificate
2006-04-18
2006-04-18
Mathews, Alan (Department: 2851)
Photocopying
Projection printing and copying cameras
With developing
C396S611000, C356S073000, C356S237400, C356S237500, C356S400000
Reexamination Certificate
active
07030957
ABSTRACT:
Apparatus for processing substrates according to a predetermined photolithography process includes a loading station in which the substrates are loaded, a coating station in which the substrates are coated with a photoresist material, an exposing station in which the photoresist coating is exposed to light through a mask having a predetermined pattern to produce a latent image of the mask on the photoresist coating, a developing station in which the latent image is developed, an unloading station in which the substrates are unloaded and a monitoring station for monitoring the substrates with respect to predetermined parameters of said photolithography process before reaching the unloading station.
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Ausschnitt C.P. et al., “Seeing the Forest of Trees: A New Approach to CD Control”, SPIE. 1998, vol. 3332, 212-220.
Cohen Yoel
Dishon Giora
Finarov Moshe
Nirel Zvi
Browdy and Neimark PLLC
Mathews Alan
Nova Measuring Instruments Ltd.
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