Monitoring an optical element of a processing head of a...

Details Monitoring an optical element of a processing head of a... Monitoring an optical element of a processing head of a...

2006-04-04

2006-04-04

Nguyen, Tu T. (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Reexamination Certificate

active

07023538

ABSTRACT:
An apparatus for monitoring an optical element of a processing head of a machine for thermal processing of a workpiece includes a light source for coupling a light beam into an optical surface of an optical element and a detector for detecting a portion of the light beam scattered in the region of the optical surface facing the workpiece.

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