Monitor wafer purchase and controls database

Details Monitor wafer purchase and controls database Monitor wafer purchase and controls database

2006-08-08

2006-08-08

Picard, Leo (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S083000, C700S095000, C700S099000, C700S107000, C700S108000, C700S214000, C715S252000, C715S739000, C715S961000, C702S188000, C705S028000

Reexamination Certificate

active

07089077

ABSTRACT:
Controlling stocker capacity in an automated facility and controlling monitor budgets by capped releases, capped FOUP supplies, and wafer reuse methodology. A Database is used to order, track, and reclaim test (monitor) wafers in the FAB. The database automatically controls the amount of FOUPs in the FAB as well as the amount of wafers released into the FAB each day. This database also interacts with the Control Center in helping to release monitor wafers in the FAB.

REFERENCES:
patent: 6748282 (2004-06-01), Lin
patent: 6865434 (2005-03-01), Lin et al.
patent: 2005/0125095 (2005-06-01), Chen et al.
E.H. Bokelberg & M.E. Pariseau, “Tracking the performance of photolithographic processes with excursion monitoring,” MICRO Magazine, Jan. 1998; www.micromagazine.com/archive/98/01/bokelber.html.

Affiliated with

Also associated with

Rating

Monitor wafer purchase and controls database does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Monitor wafer purchase and controls database, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Monitor wafer purchase and controls database will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3659819