Monitor plate for automatic particle detection system

Details Monitor plate for automatic particle detection system Monitor plate for automatic particle detection system

1991-12-12

1993-05-25

Rosenberger, Richard A.

Optics: measuring and testing

Standard

356237, 356394, G01J 102, G01B 1100

Patent

active

052144860

ABSTRACT:
The present invention provides a verification plate to verify the accuracy and precision of a mask inspection system in detecting contaminated particles. The verification plate is developed on a substrate having a plurality of predefined glass, i.e., transparent, and chrome, i.e., opaque, patterns. A predetermined number of verification particles each with a predefined size, shape, and location are securely disposed on these glass-chrome patterns. The verification plate is preferably produced having both the glass-chrome patterns and the particles arranged in an orderly manner such that a verification process can be automated under the control of a computer program.

REFERENCES:
patent: 3963354 (1976-06-01), Feldman et al.
patent: 4386850 (1983-06-01), Leahy
patent: 4512659 (1985-04-01), Galbraith et al.
API-3000 Inspection System Specification, Jun. 1990 QC Optics, Inc.
Laser Users Symposium of Technology, MIE Theory and Diffraction, by Prof. Sergey Broude.
Mask Repair Technologies, by Shigeru Noguchi of Dai Nippon Printing Co., Ltd., Saitama, Japan.

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