Thermal measuring and testing – Temperature measurement – By electrical or magnetic heat sensor
Patent
1997-04-28
2000-02-08
Miska, Vit
Thermal measuring and testing
Temperature measurement
By electrical or magnetic heat sensor
374183, 374185, 438643, 438653, G01K 716, H01L 2128
Patent
active
060221429
ABSTRACT:
A method of measuring a substrate temperature includes the steps of: forming a first lamination of different metals on a substrate; subjecting the substrate to a heat treatment; measuring a sheet resistance of the substrate after the heat treatment; and estimating a temperature of the substrate during the heat treatment from a correlation between sheet resistances and heat treatment temperatures, the correlation being prepared in advance by subjecting preparatory substrates each having a second lamination having the same structure as the first lamination to heat treatments at a plurality of predetermined heat treatment temperatures and by measuring the sheet resistance of each second lamination layer after the heat treatment. The substrate temperature during heat treatment can be estimated easily without intervening the actual manufacture process by a temperature measuring process.
REFERENCES:
patent: 4764026 (1988-08-01), Powell et al.
patent: 5278099 (1994-01-01), Maeda
patent: 5435646 (1995-07-01), McArthur et al.
patent: 5637924 (1997-06-01), Hibino
patent: 5705429 (1998-01-01), Yamaha et al.
patent: 5801425 (1998-09-01), Kuroi et al.
Miska Vit
Yamaha Corporation
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