Abrading – Precision device or process - or with condition responsive... – By optical sensor
Reexamination Certificate
2005-07-12
2005-07-12
Nguyen, George (Department: 3723)
Abrading
Precision device or process - or with condition responsive...
By optical sensor
C451S005000, C451S041000, C451S285000, C451S287000
Reexamination Certificate
active
06916225
ABSTRACT:
The end portion on the side of the second end surface of the first optical fiber62is inserted into the inner race in the central part of the roll-bearing type bearing36, and is fastened to this inner race. The fastening position of this end surface on the side of the second end surface is adjusted to match a specified position on the axis of rotation11in order to emit probe light and allow the incidence of the reflected signal light. The probe light emitted from the second end surface of the second optical fiber61passes through the transparent window23and is caused to illuminate the polished surface of the substrate42. The reflected signal light that is reflected from this point again passes through the transparent window23in the opposite direction, and is incident on the second end surface of the second optical fiber61. Thus, even in cases where monitoring is performed in an operating state in which the polishing surface plate of the polishing apparatus is rotating, the first optical fiber62can be kept in a non-rotating state; as a result, the light source24, beam splitter25, light detector26and first light-coupling lens63, which require installation space, can be installed in non-rotating positions.
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Ohuchi Yasushi
Sugiyama Yoshikazu
Morgan & Lewis & Bockius, LLP
Nguyen George
Nikon Corporation
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