Monitor mechanism for use with a scanning optical apparatus with

Details Monitor mechanism for use with a scanning optical apparatus with Monitor mechanism for use with a scanning optical apparatus with

1989-12-01

1991-08-27

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Photocell controlled circuit

2191218, 250225, H01J 4014

Patent

active

050435663

ABSTRACT:
A monitor mechanism for use with a scanning optical apparatus in which the direction of polarization is utilized to separate a source laser light beam into a pattern drawing and a monitor beamlet and to synthesize them again into a single after passing through a scanning lens and beam deflector. The two beamlets can thus be controlled so as to project towards the deflector and scanning lens in the same direction, which is effective in reducing the offset between the pattern drawing and monitor beams that may occur on account of such factors as variations in lens performance.

REFERENCES:
patent: 4695698 (1987-09-01), Mayor et al.

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