Molybdenum enhanced low-temperature deposition of crystalline si

Details Molybdenum enhanced low-temperature deposition of crystalline si Molybdenum enhanced low-temperature deposition of crystalline si

1992-03-10

1994-04-05

Beck, Shrive

Coating processes

Coating by vapor, gas, or smoke

Base includes an inorganic compound containing silicon or...

4272551, C23C 1634, C23C 1642

Patent

active

053003225

ABSTRACT:
A process for chemical vapor deposition of crystalline silicon nitride which comprises the steps of: introducing a mixture of a silicon source, a molybdenum source, a nitrogen source, and a hydrogen source into a vessel containing a suitable substrate; and thermally decomposing the mixture to deposit onto the substrate a coating comprising crystalline silicon nitride containing a dispersion of molybdenum silicide.

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