Moly mask removal tool

Details Moly mask removal tool Moly mask removal tool

1985-09-13

1987-02-17

Dawson, Robert A.

Adhesive bonding and miscellaneous chemical manufacture

Surface bonding means and/or assembly means therefor

Presses or press platen structures, per se

294264, 29762, 156344, 156631, 228264, B32B 3118

Patent

active

046437967

ABSTRACT:
An apparatus for removing a mask which extends beyond the outer edges of a semiconductor wafer bonded thereto. The apparatus includes a base having a vacuum chamber opening onto the upper surface of the base, a vacuum valve separating the vacuum chamber from a vacuum source, an actuating lever and a mask discharge facilitator. The discharge facilitator comprising a horizontal plate having a plurality of vertical pins around the periphery thereof. When the lever is actuated, it opens the vacuum valve and lifts the discharge facilitator forcing the vertical pins into contact with the mask. The simultaneous application of the vacuum holding force, and vertical force applied by the pins causes the separation of the mask from the upper surface of the wafer.

REFERENCES:
patent: 3303979 (1967-02-01), Lang
patent: 3494093 (1969-12-01), Mermelstein
patent: 3955163 (1976-05-01), Novak
patent: 3960623 (1976-06-01), Gantley
patent: 4255216 (1981-03-01), Conant et al.

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