Molecular vacuum pump with a gas-cooled rotor

Details Molecular vacuum pump with a gas-cooled rotor Molecular vacuum pump with a gas-cooled rotor

1996-02-06

1998-01-13

Gluck, Richard E.

Pumps

Processes

4174234, 4174238, 415177, F04D 1904

Patent

active

057072132

ABSTRACT:
A method of cooling rotor elements of a molecular vacuum pump having stator and rotor elements, a suction flange defining a gas inlet, and a gas outlet spaced from the suction flange, the method including providing additional gas inlet between the suction flange and the gas outlet and admitting through the additional gas inlet a cooling gas having a thermal conductivity larger than that of the compressible gas.

REFERENCES:
patent: 4929151 (1990-05-01), Long et al.
patent: 5350275 (1994-09-01), Ishimaru
patent: 5577883 (1996-11-01), Schutz et al.
"Vacuum Physics and Techniques", Chapman & Hall, 1993, pp. 13, 14 and 29.
"Vacuumtechnik der Fa. Balzers", PM 800 049 PD, p. 9.

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