Molecular vacuum pump structure

Details Molecular vacuum pump structure Molecular vacuum pump structure

1974-03-28

1976-03-30

Raduazo, Henry F.

Rotary kinetic fluid motors or pumps

Plural runners having different type flow paths

417201, 415 90, F04D 110

Patent

active

039471934

ABSTRACT:
The structure comprises a turbo-molecular pumping element providing a very moderate compression ratio and a rotating drum type pumping element equipped with an interchangeable stator or drum. These two elements are mounted in series and driven in a rotating movement by a single shaft. On the interchangeable part, parallel helical grooves whose depth depends on the molecular mass of the gas to be pumped are formed.

REFERENCES:
patent: 1906715 (1933-05-01), Penick
patent: 2479724 (1949-08-01), Bucklein
patent: 2730297 (1956-01-01), Van Dorsten et al.
patent: 3168977 (1965-02-01), Garnier et al.
patent: 3404867 (1968-10-01), Williams et al.
patent: 3749528 (1973-07-01), Rousseau
patent: 3832084 (1974-08-01), Maurice

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